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  [MEMS Sensing Elements] 5000 Series High Pressure
  ±Û¾´ÀÌ : ´ÙÀÏIBC     ³¯Â¥ : 11-11-05 20:38     Á¶È¸ : 9720    
(Piezoresistive Pressure Sensors, ¾ÐÀúÇ×½Ä ¾Ð·Â¼¾¼­)
 
 
 
 

The 5000 Series High Pressure is ideal for
high-volume, high-pressure OEM applications.

 
Overview
Features
Range     :    1,000 to 10,000 psi (69 to 689 bar; 6,895 to 68,948 KPa)
Type       :    Absolute
Media      :    Clean, dry air and non-corrosive gasses
Shipping   :   Wafers on tape
Flexibility  :   Sensitivity, resistance, bridge, constraint, etc.
Benefits
Performance : Enjoy best-in-class performance due to Merit¡¯s proprietary Sentium technology
Cost              : Save money over time with high-performing die
Security         : Feel confident doing business with an experienced company backed 
                        by a solid parent company (NASDAQ: MMSI)
Speed            : Get to market quickly with creative and flexible solutions.
Service          : Experience prompt, personal and professional support.
 
 
Specifications
Parameter Minimum Typical Maximum Units Notes
Electrical & Environmental
Excitation ¡¡ 5 15 V Maximum: 3mA
Impedance 4000 5000 6000 ¥Ø Optional: 3,500 +/- 500
Operating Temperature -40 ¡¡ 150 ¡ÆC Sentium¢ç technology
Storage Temperature -55 ¡¡ 160 ¡ÆC ¡¡
Performance
Offset -10 0 10 mV/V Zero pressure; @25¡ÆC
Non-linearity -0.15 0 0.15 % FSO BFSL; @25¡ÆC
Non-linearity (>5000) -0.35 0 0.35 % FSO BFSL; @25¡ÆC
Pressure Hysteresis -0.05 0 0.05 % FSO @25¡ÆC
Temp Coeff - Zero -25 0 25 µV/V/¡ÆC -40¡ÆC to 150¡ÆC
Temp Coeff - Resistance 2300 2800 3300 PPM/¡ÆC -40¡ÆC to 150¡ÆC
Temp Coeff - Sensitivity -1500 -2200 -2500 PPM/¡ÆC -40¡ÆC to 150¡ÆC
Thermal Hysteresis -0.1 0 0.1 % FSO Zero pressure
Long-Term Stability -0.1 0 0.1 % FSO ¡¡
Burst Pressure 3X ¡¡ ¡¡ ¡¡ Full scale pressure
Full-Scale Output (@ 5 volts) Other outputs available upon request
1,000 psi (68.9 bar; 6,895 KPa) 105 125 145 mV ¡¡
3,000 psi (207 bar; 20,684 KPa) 150 180 210 mV ¡¡
5,000 psi (345 bar 34,474 KPa) 165 200 235 mV ¡¡
10,000 psi (689 bar 68,948 KPa) 250 300 350 mV ¡¡
 
 
               Dimensions (millimeters, post-cut)
 
         
 
           Standard Bond Pad Metallization = Aluminum
 
 
                                    Other contraints available
 

Electrical

 
 Part Number Configurator
 
 
Example: 5SO-0025-5T offers 5kohm Impedance, Open Bridge, 1000 psi and Absolute Constraint
Standard Part Numbers
5SO-0025-5T 6SO-0025-5T
5SO-0012-5T 6SO-0012-5T
5SO-0008-5T 6SO-0008-5T
5SO-0006-5T 6SO-0006-5T
5SH-0025-5T 6SH-0025-5T
5SH-0012-5T 6SH-0012-5T
5SH-0008-5T 6SH-0008-5T
5SH-0006-5T 6SH-0006-5T
5SC-0025-5T 6SC-0025-5T
5SC-0012-5T 6SC-0012-5T
5SC-0008-5T 6SC-0008-5T
5SC-0006-5T 6SC-0006-5T

Note: ¡°T¡± in part number = sawn wafer on tape in metal frame
  
 
Merit Sensor Systems Çѱ¹´ë¸®Á¡ (ÁÖ)´ÙÀϾÆÀ̺ñ¾¾ 
 
   


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