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  [MEMS Sensing Elements] 5000 Series High Pressure
  글쓴이 : 다일IBC     날짜 : 11-11-05 20:38     조회 : 5411    
(Piezoresistive Pressure Sensors, 압저항식 압력센서)
 
 
 
 

The 5000 Series High Pressure is ideal for
high-volume, high-pressure OEM applications.

 
Overview
Features
Range     :    1,000 to 10,000 psi (69 to 689 bar; 6,895 to 68,948 KPa)
Type       :    Absolute
Media      :    Clean, dry air and non-corrosive gasses
Shipping   :   Wafers on tape
Flexibility  :   Sensitivity, resistance, bridge, constraint, etc.
Benefits
Performance : Enjoy best-in-class performance due to Merit’s proprietary Sentium technology
Cost              : Save money over time with high-performing die
Security         : Feel confident doing business with an experienced company backed 
                        by a solid parent company (NASDAQ: MMSI)
Speed            : Get to market quickly with creative and flexible solutions.
Service          : Experience prompt, personal and professional support.
 
 
Specifications
Parameter Minimum Typical Maximum Units Notes
Electrical & Environmental
Excitation   5 15 V Maximum: 3mA
Impedance 4000 5000 6000 Ω Optional: 3,500 +/- 500
Operating Temperature -40   150 °C Sentium® technology
Storage Temperature -55   160 °C  
Performance
Offset -10 0 10 mV/V Zero pressure; @25°C
Non-linearity -0.15 0 0.15 % FSO BFSL; @25°C
Non-linearity (>5000) -0.35 0 0.35 % FSO BFSL; @25°C
Pressure Hysteresis -0.05 0 0.05 % FSO @25°C
Temp Coeff - Zero -25 0 25 µV/V/°C -40°C to 150°C
Temp Coeff - Resistance 2300 2800 3300 PPM/°C -40°C to 150°C
Temp Coeff - Sensitivity -1500 -2200 -2500 PPM/°C -40°C to 150°C
Thermal Hysteresis -0.1 0 0.1 % FSO Zero pressure
Long-Term Stability -0.1 0 0.1 % FSO  
Burst Pressure 3X       Full scale pressure
Full-Scale Output (@ 5 volts) Other outputs available upon request
1,000 psi (68.9 bar; 6,895 KPa) 105 125 145 mV  
3,000 psi (207 bar; 20,684 KPa) 150 180 210 mV  
5,000 psi (345 bar 34,474 KPa) 165 200 235 mV  
10,000 psi (689 bar 68,948 KPa) 250 300 350 mV  
 
 
               Dimensions (millimeters, post-cut)
 
         
 
           Standard Bond Pad Metallization = Aluminum
 
 
                                    Other contraints available
 

Electrical

 
 Part Number Configurator
 
 
Example: 5SO-0025-5T offers 5kohm Impedance, Open Bridge, 1000 psi and Absolute Constraint
Standard Part Numbers
5SO-0025-5T 6SO-0025-5T
5SO-0012-5T 6SO-0012-5T
5SO-0008-5T 6SO-0008-5T
5SO-0006-5T 6SO-0006-5T
5SH-0025-5T 6SH-0025-5T
5SH-0012-5T 6SH-0012-5T
5SH-0008-5T 6SH-0008-5T
5SH-0006-5T 6SH-0006-5T
5SC-0025-5T 6SC-0025-5T
5SC-0012-5T 6SC-0012-5T
5SC-0008-5T 6SC-0008-5T
5SC-0006-5T 6SC-0006-5T

Note: “T” in part number = sawn wafer on tape in metal frame
  
 
Merit Sensor Systems 한국대리점 (주)다일아이비씨 
 
   


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