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  [MEMS Sensing Elements] 7000 Series Broad Pressure
  글쓴이 : 다일IBC     날짜 : 11-11-05 21:06     조회 : 5958    
(Piezoresistive Pressure Sensors, 압저항식 압력센서)
 
 

The 7000 Series Broad Pressure is ideal for
high-volume, medium-pressure, small-package OEM applications.

Overview
Features
Range       : 15 to 500 psi (1 to 34.5 bar; 103 to 3,447 KPa)
Type         : Absolute, gage, differential and vacuum
Media        : Clean, dry air and non-corrosive gasses
Shipping  :  Wafers on tape
Flexibility  :  Sensitivity, resistance, bridge, constraint, etc.
Benefits
Performance : Enjoy best-in-class performance due to Merit’s proprietary Sentium technology
Cost             : Save money over time with high-performing die
Security       : Feel confident doing business with an experienced company backed 
                           by a solid parent company (NASDAQ: MMSI)
Speed       : Get to market quickly with creative and flexible solutions.
Service       :  Experience prompt, personal and professional support.
 
 
Parameter Minimum Typical Maximum Units Notes
Electrical & Environmental
Excitation   5 15 V Maximum: 3mA
Impedance 4000 5000 6000 Ω Optional: 3,500 +/- 500
Operating Temperature -40   150 °C Sentium® technology
Storage Temperature -55   160 °C  
Performance
Offset -10 0 10 mV/V Zero pressure; gage only; @25°C
Non-linearity -0.2 0 0.2 % FSO Best Fit Straight Line; @25°C
Pressure Hysteresis -0.1 0 0.1 % FSO @25°C
Temp Coeff - Zero -25 0 25 µV/V/°C -40°C to 150°C
Temp Coeff - Resistance 2300 2800 3300 PPM/°C -40°C to 150°C
Temp Coeff - Sensitivity -1500 -2200 -2500 PPM/°C -40°C to 150°C
Thermal Hysteresis -0.1 0 0.1 % FSO Zero pressure
Long-Term Stability -0.1 0 0.1 % FSO  
Burst Pressure 3X       Full scale pressure
Full-Scale Output (@ 5 volts) Other outputs available upon request
15 psi (1 bar; 103 KPa) 60 75 90 mV  
50 psi (3.4 bar; 345 KPa) 100 125 150 mV  
100 psi (6.9 bar 689 KPa) 120 150 180 mV  
300 psi (20.7 bar 2,068 KPa) 120 150 180 mV  
500 psi (34.5 bar; 3,447 KPa) 140 175 210 mV  
 
 

Part Details

 
Dimensions (millimeters, post-cut)
 
Standard Bond Pad Metallization = Aluminum
 
 
Absolute also; other contraints available


Electrical

Part Number Configurator

 
Example: 7SO-0300-9T offers 5kohm Impedance, Open Bridge, 100 psi and Gage Constraint
Standard Part Numbers
7SO-1000-5T 8SO-1000-5T
7SO-0500-5T 8SO-0500-5T
7SO-0300-5T 8SO-0300-5T
7SO-0100-5T 8SO-0100-5T
7SO-0070-5T 8SO-0070-5T
7SO-1000-9T 8SO-1000-9T
7SO-0500-9T 8SO-0500-9T
7SO-0300-9T 8SO-0300-9T
7SO-0100-9T 8SO-0100-9T
7SO-0070-9T 8SO-0070-9T
7SH-1000-5T 8SH-1000-5T
7SH-0500-5T 8SH-0500-5T
7SH-0300-5T 8SH-0300-5T
7SH-0100-5T 8SH-0100-5T
7SH-0070-5T 8SH-0070-5T
7SH-1000-9T 8SH-1000-9T
7SH-0500-9T 8SH-0500-9T
7SH-0300-9T 8SH-0300-9T
7SH-0100-9T 8SH-0100-9T
7SH-0070-9T 8SH-0070-9T
7SC-1000-5T 8SC-1000-5T
7SC-0500-5T 8SC-0500-5T
7SC-0300-5T 8SC-0300-5T
7SC-0100-5T 8SC-0100-5T
7SC-0070-5T 8SC-0070-5T
7SC-1000-9T 8SC-1000-9T
7SC-0500-9T 8SC-0500-9T
7SC-0300-9T 8SC-0300-9T
7SC-0100-9T 8SC-0100-9T
7SC-0070-9T 8SC-0070-9T
Note: “T” in part number = sawn wafer on tape in metal frame

 
Merit Sensor Systems 한국대리점 (주)다일아이비씨 
 
 
   


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