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  [MEMS Sensing Elements] J Series – Low Pressure
  글쓴이 : 다일IBC     날짜 : 15-11-09 19:46     조회 : 3086    
(Piezoresistive Pressure Sensors / 압저항식 압력센서)
 
                      
Overview

Features

Range            3 to 300 psi (0.21 to 21 bar; 21 to 2100 KPa)
Type               Absolute, gage, differential and vacuum
Media             Clean, dry air and non-corrosive gases
Shipping        Wafers on tape, waffle pack
Flexibility       Sensitivity, resistance, bridge, constraint, etc.


Benefits

Performance Enjoy best-in-class performance due to Merit’s proprietary Sentium technology
Cost             Save money over time with high-performing die
Security        Feel confident doing business with an experienced company backed by a solid  
                         parent company (NASDAQ: MMSI)
Speed          Get to market quickly with creative and flexible solutions.
Service         Experience prompt, personal and professional support.

 
 
Applications
 

                       
 
Merit Sensor Systems, Inc. has partnered with customers for more than 20 years to design, fabricate, assemble and package reliable, cost-effective piezoresistive pressure sensor solutions for automotive, medical, industrial, aviation, defense and consumer applications.
 
Merit Sensor offers full-service design capabilities, in-house wafer fabrication, flexible shipping, packaging and assembly, piezoresistive technology (PRT), expansive pressure ranges (0.15 psi to 15,000 psi), complete pressure measurement (absolute, gage, differential and vacuum) and unmatched operating temperature range (-40°C to 150°C) via our Sentium® process. Additionally, Merit Sensor is able to provide unparalleled flexibility to customize pressure sensing solutions to fit into our customers’ applications.
 
Unlike other pressure sensor suppliers, Merit Sensor can provide customers with completely customized pressure sensor designs with large or smaller/limited production runs. Our customers range from pressure sensor transducer manufacturers who are already experts in pressure sensing technology and rely on Merit Sensor for highly stable and sensitive MEMS sensing elements (bare die), to customers who have little to no experience in the pressure sensing world and look to Merit Sensor to assist with a completely custom design and implementation of a pressure sensor that best fits their application.
 
At Merit Sensor our engineers are application experts. We are ready to help customers design your application to work with a pressure sensor, and/or design a customized pressure sensing solution that works for your application. If you are unsure whether a pressure sensor is right for your application, Merit Sensor can help you make that determination.

 
Specifications
 
 
Parameter Minimum Typical Maximum Units Notes
Electrical & Environmental
Excitation 1.5 mA Maximum: 3mA
Impedance 4000 5000 6000 Ω Optional: 3,500 ± 500
Operating Temperature -40 150 °C Sentium® technology
Storage Temperature -55 160 °C
Performance
Offset -5 0 5 mV/V Zero pressure; gage only; @25°C
Non-linearity -0.15 0 0.15 % FSO Best Fit Straight Line; @25°C
Pressure Hysteresis -0.1 0 0.1 % FSO @25°C
Temp Coeff – Zero -25 0 25 µV/V/°C -40°C to 150°C
Temp Coeff – Resistance 2500 3000 3500 PPM/°C -40°C to 150°C
Temp Coeff – Sensitivity -1500 -2000 -2500 PPM/°C -40°C to 150°C
Thermal Hysteresis -0.2 0 0.2 % FSO Zero pressure -40°C to 150°C
Long-Term Stability -0.2 0 0.2 % FSO Zero pressure
Burst Pressure 5X Full scale pressure
Full-Scale Output (@ 1.5 mA excitation)
3 psi (0.21 bar; 21 kPa) 95 120 145 mV Other outputs available upon request
5 psi (0.34 bar; 34 kPa) 95 120 145 mV
15 psi (1 bar; 103 kPa) 95 120 145 mV
30 psi (2 bar; 207 kPa) 95 120 145 mV
50 psi (3.5 bar; 345 kPa) 95 120 145 mV
100 psi (7 bar; 670 kPa) 95 120 145 mV
150 psi (10 bar; 1035 kPa) 95 120 145 mV
300 psi (21 bar; 2070 kPa) 95 120 145 mV
Parameter Minimum Typical Maximum Units Notes
Electrical & Environmental
Excitation 1.5 mA Maximum: 3mA
Impedance 4000 5000 6000 Ω Optional: 3,500 ± 500
Operating Temperature -40 150 °C Sentium® technology
Storage Temperature -55 160 °C
Performance
Offset -5 0 5 mV/V Zero pressure; gage only; @25°C
Non-linearity -0.15 0 0.15 % FSO Best Fit Straight Line; @25°C
Pressure Hysteresis -0.1 0 0.1 % FSO @25°C
Temp Coeff – Zero -25 0 25 µV/V/°C -40°C to 150°C
Temp Coeff – Resistance 2500 3000 3500 PPM/°C -40°C to 150°C
Temp Coeff – Sensitivity -1500 -2000 -2500 PPM/°C -40°C to 150°C
Thermal Hysteresis -0.2 0 0.2 % FSO Zero pressure -40°C to 150°C
Long-Term Stability -0.2 0 0.2 % FSO Zero pressure
Burst Pressure 5X Full scale pressure
Full-Scale Output (@ 1.5 mA excitation)
3 psi (0.21 bar; 21 kPa) 95 120 145 mV Other outputs available upon request
5 psi (0.34 bar; 34 kPa) 95 120 145 mV
15 psi (1 bar; 103 kPa) 95 120 145 mV
30 psi (2 bar; 207 kPa) 95 120 145 mV
50 psi (3.5 bar; 345 kPa) 95 120 145 mV
100 psi (7 bar; 670 kPa) 95 120 145 mV
150 psi (10 bar; 1035 kPa) 95 120 145 mV
300 psi (21 bar; 2070 kPa) 95 120 145 mV
 
 
 
 
Part Details
 
 
DIMENSIONS (millimeters, post-cut)
 
 
 
 
 
ELECTRICAL
 
 
 
 
Merit Sensor Systems 한국 총판 (주)다일아이비씨
   


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